L
Luke Minardi
Publications - 1
Citations - 45
Luke Minardi is an academic researcher. The author has contributed to research in topics: Plasma etching. The author has an hindex of 1, co-authored 1 publications receiving 35 citations.
Papers
More filters
Journal ArticleDOI
Review Article: Plasma–surface interactions at the atomic scale for patterning metals
TL;DR: In this article, a generalized methodology combining thermodynamic assessment and kinetic verification of surface reactions is presented for tailoring plasma-surface interactions at the atomic scale for a wide range of materials.