M
M Becker
Researcher at Oregon Health & Science University
Publications - 1
Citations - 54
M Becker is an academic researcher from Oregon Health & Science University. The author has contributed to research in topics: Surface micromachining & Focused ion beam. The author has an hindex of 1, co-authored 1 publications receiving 52 citations.
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FIB micromachined submicron thickness cantilevers for the study of thin film properties
TL;DR: In this paper, single crystal Si cantilevers were fabricated in a focused ion beam (FIB) milling workstation to investigate the mechanical properties of thin films deposited on the completed cantilever.