M
M. Bruel
Publications - 1
Citations - 1106
M. Bruel is an academic researcher. The author has contributed to research in topics: Wafer & Wafer bonding. The author has an hindex of 1, co-authored 1 publications receiving 1088 citations.
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Silicon on insulator material technology
TL;DR: In this article, a silicon on insulator material technology based on wafer bonding is described, in which a heat treatment induces an in-depth microslicing of one of the two bonded wafers previously implanted with hydrogen.