This invention relates to novel, transparent oxide semiconductor thin film transistors (TFT's) and a process for making them.

Transparent oxide semiconductor thin film transistors

This review surveys methods for the fabrication, by plasma surface treatments or plasma polymerization, of polymeric surfaces and thin plasma polymer coatings that contain reactive chemical groups useful for the subsequent covalent immobilization, by solution chemical reactions or vapor phase grafting, of molecules or polymers that can exert bio-specific interfacial responses. Surfaces containing amine, carboxy, hydroxy, and aldehyde groups are the subject of this review. Aminated surfaces have been fabricated using various plasma vapors or mixtures and have found wide use for bio-interface applications. However, in many cases the amine surfaces have a rather limited shelf life, with post-plasma oxidation reactions and surface adaptation leading to the disappearance of amine groups from the surface. Aging is a widespread phenomenon that often has not been recognized, particularly in some of the earlier studies on the use of plasma-fabricated surfaces for bio-interfacial applications, and can markedly alter the surface chemistry. Plasma-fabricated surfaces that contain carboxy groups have also been well documented. Fewer reports exist on hydroxy and aldehyde surfaces prepared by plasma methods. Hydroxy surfaces can be prepared by water plasma treatment or the plasma polymerization of alkyl alcohol vapors. Water plasma treatment on many polymer substrates suffers from aging, with surface adaptation leading to the movement of surface modification effects into the polymer. Both hydroxy and aldehyde surfaces have been used for the covalent immobilization of biologically active molecules. Aging effects are less well documented than for amine surfaces. This review also surveys studies using such surfaces for cell colonization assays. Generally, these surface chemistries show good ability to support cell colonization, though the effectiveness seems to depend on the process vapor and the plasma conditions. Carboxylate co-polymer surfaces have shown excellent ability to support the colonization of some human cell lines of clinical interest. Immobilization of proteins onto plasma-carboxylated surfaces is also well established.

Plasma Methods for the Generation of Chemically Reactive Surfaces for Biomolecule Immobilization and Cell Colonization ‐ A Review

https://biblio.ugent.be/publication/792032/file/8599453.pdf

Nonthermal Plasma Technology as a Versatile Strategy for Polymeric Biomaterials Surface Modification: A Review

Durability of nanosized oxygen-barrier coatings on polymers

Book reviewPhysics of non-crystalline solids: edited by J. A. Prins. 667 pages, diagrams, illus. 6 × 9 in. New York, John Wiley & Sons, Interscience, 1965. Price, $27.50

Structural and optical properties of sputtered ZnO films

Thin films of zirconium oxide were prepared by r.f. magnetron sputtering from a ZrO2 target. A systematic study has been made on the influence of the sputtering parameters (total pressure, oxygen partial pressure and r.f. power) on the film composition and on their structural and optical properties. The zirconia films crystallize either in the cubic or in the monoclinic phases depending on the sputtering gas. The crystallinity and the compactness of the films were found to increase with the kinetic energy of the sputtered particles. The stresses are compressive and become very important in thick films deposited at a high power density. Films are generally substoichiometric and their O/Zr atomic ratio was found to increase with the oxygen partial pressure. On the contrary, films deposited at high sputtering pressures (more than 5 Pa) contain an oxygen excess. This overstoichiometry results, as it was revealed by F. T. I. R. analyses, from the incorporation of water and hydroxyl groups into the ZrO2 structure. The optical constants (refractive index and extinction coefficient) vary also in a wide range with the deposition conditions. These variations were correlated mainly to structural properties.

M. Jacquet

Papers

Structural and optical properties of sputtered ZnO films

Characterization of zirconia films deposited by r.f. magnetron sputtering

XPS characterisation of plasma-treated and alumina-coated PMMA

Elaboration, characterization and dielectric properties study of amorphous alumina thin films deposited by r.f. magnetron sputtering

X-ray photoelectron spectroscopy studies of plasma-modified PET surface and alumina/PET interface