M
M. Wasilik
Publications - 1
Citations - 1256
M. Wasilik is an academic researcher. The author has contributed to research in topics: Etching (microfabrication) & Buffered oxide etch. The author has an hindex of 1, co-authored 1 publications receiving 1191 citations.
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Etch rates for micromachining processing-Part II
TL;DR: In this paper, the etch rates of 53 materials that are used or potentially can be used or in the fabrication of microelectromechanical systems and integrated circuits were prepared.