A marriage of optical fibre fabrication technology and LSI microfabrication technology gave birth to fibre-matched silica waveguides on silicon: thick glass layers of high-silica-content glass are deposited on silicon by flame hydrolysis, a method originally developed for fibre preform fabrication. Silica channel waveguides are then formed by photolithographic pattern definition processes followed by reactive ion etching. This ‘high silica (HiS) technology’ offers the possibility of integrating a number of passive functions on a single silicon chip, as well as the possibility of the hybrid integration of both active and passive devices on silicon. This paper reviews the NTT HiS technology and its application to integrated-optic components such as optical beam splitters, optical switches, wavelength-division multi/demultiplexers and optical frequency-division multi/demultiplexers. The clear and simple waveguide structures produced by the HiS technology make it possible to design and fabricate these components with high precision and excellent reproducibility.

Silica waveguides on silicon and their application to integrated-optic components

TUTORIAL REVIEW Silica waveguides on silicon and their application to integrated-optic components

Work on deposited glass waveguides on silicon to form waveguides and filters is reviewed. The choice of these particular waveguides makes sense only as part of a consistent approach to optoelectronic packaging. Hybrid optical packaging on silicon (HOPS) is described and briefly compared with other techniques. For these packages, two waveguides were developed: a tight mode waveguide with a silicon nitride rib core for matching a semiconductor laser and a loose mode waveguide with a phosphosilicate glass core for matching an optical fiber. >

Glass waveguides on silicon for hybrid optical packaging

A zigzag waveguide device is described that includes at least two optical waveguides converged at a vertex to form a waveguide overlap region. Optical loss in the waveguide overlap region is minimized by including a narrow gap of lower refractive index between the overlap region and each waveguide. This technique is also applied to minimize loss in a region where two optical waveguides cross one another. A mirror or optical filter reflectively couples the two waveguides at the vertex. When the coupling is provided by an optical filter, some range of wavelengths is transmitted out of the zigzag waveguide device, rather than reflected. The transmitted light may be collected by an output waveguide which is wider than the waveguides to minimize loss due to divergence. Light exiting the device may be coupled directly to a photodetector with no intervening optical fiber. In addition, the width of an input waveguide of the zigzag waveguide device is tapered to reduce angular spread of the light in the zigzag device.

Optical waveguide device for wavelength demultiplexing and waveguide crossing

An edge emitting optoelectronic source (120) is integrally formed on a surface (112) of a semiconductor substrate. An optical waveguide (130) is integrally formed on the same surface of the substrate adjacent to the source. The waveguide is aligned with the source for optical coupling of the source to the waveguide. The waveguide comprises an optical diverter for diverting at least a portion of any light propagating along the waveguide toward the source through a surface of the waveguide. An optoelectronic detector (150) is secured to that surface of the waveguide through which light is diverted for receiving light diverted through that surface. The resulting optoelectronic apparatus is suitable for launching and detecting optical signals in large volume bidirectional optical fiber transmission systems.

Optoelectronic apparatus and method for its fabrication

A guided-wave optical waveguide-division multi/demultiplexer for bidirectional transmission at (0.81 μm, 1.2 μm)/(0.89 μm, 1.3 μm) wavelengths has been realised using high-silica channel waveguides on silicon substrate. The multi/demultiplexer connected with graded-index multi-mode fibres shows a loss of 3.5−5 dB together with far-end and near-end crosstalk levels less than −30 dB and −50 dB, respectively.

M. Yasu

Papers

Guided-wave optical wavelength-division multi/demultiplexer using high-silica channel waveguides