M
Masaharu Kato
Publications - 2
Citations - 134
Masaharu Kato is an academic researcher. The author has contributed to research in topics: Stress relaxation & Micromechanics. The author has an hindex of 2, co-authored 2 publications receiving 133 citations.
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Stress distribution in an aluminum interconnect of very large scale integration
TL;DR: In this paper, the authors applied Eshelby's method in micromechanics to evaluate the stresses in the Al line of aluminum interconnects and found that the calculated stresses can induce relaxation by plastic deformation.
Journal ArticleDOI
Diffusional relaxation and void growth in an aluminum interconnect of very large scale integration
TL;DR: In this article, the authors used the previously obtained stress distributions in an Al line after relaxation by plastic deformation, another possible relaxation process by diffusion was analyzed, and the time to failure of the Al line was estimated analytically.