Masahiro Tsugai

TL;DR: In this paper, a semiconductor accelerometer switch having a fixed portion including a first control electrode and a movable body was used to detect acceleration having a magnitude in a direction on the switch.

TL;DR: In this paper, a micro-mirror device includes a mirror forming substrate on which a mirror is disposed, and an anchor projects from a supporting substrate, supporting the ends of the torsion beams.

TL;DR: A capacitance detecting circuit which can ensure flexibility in application without restriction imposed by a capacitance arrangement such as a single capacitance, differential capacitance or electrostatic servo and like arrangements, to a great advantage includes an operational amplifier having an inverting input terminal and an output terminal between which a feedback capacitance component is connected.

TL;DR: In this paper, a micro-optical distance sensor was developed by a combination of LIGA technology and Si micromachining in order to meet industrial demands for miniaturization and low cost.

TL;DR: An inertial detecting device for detecting a change in capacitance of a sensor element caused by inertial force includes a displaceable unit, which is supported by a pair of beams fixed on the substrate as mentioned in this paper.