Y
Yoshio Mita
Researcher at University of Tokyo
Publications - 213
Citations - 1753
Yoshio Mita is an academic researcher from University of Tokyo. The author has contributed to research in topics: Microelectromechanical systems & Deep reactive-ion etching. The author has an hindex of 18, co-authored 198 publications receiving 1574 citations. Previous affiliations of Yoshio Mita include Centre national de la recherche scientifique & Mitsubishi.
Papers
More filters
Journal ArticleDOI
Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures
Frederic Marty,Lionel Rousseau,Bassam Saadany,Bruno Mercier,Olivier Français,Yoshio Mita,Tarik Bourouina +6 more
TL;DR: Different processes involving an inductively coupled plasma reactor either for deep reactive ion etching or for isotropic etching of silicon for photonic MEMS application is presented.
Journal ArticleDOI
Design, fabrication, and control of MEMS-based actuator arrays for air-flow distributed micromanipulation
TL;DR: In this article, the authors present an original design of pneumatic microactuator, improving reliability and durability of a distributed planar micromanipulator described in the previous study.
Journal ArticleDOI
Free-Space Tunable and Drop Optical Filters Using Vertical Bragg Mirrors on Silicon
Bassam Saadany,Maurine Malak,Masanori Kubota,Frédéric Marty,Yoshio Mita,Diaa Khalil,Tarik Bourouina +6 more
TL;DR: In this paper, vertical Bragg grating mirrors are realized by the anisotropic etching of Si using deep reactive ion etching (DRIE), thus producing multiple vertical interfaces between Si and air.
Journal ArticleDOI
A silicon shadow mask for deposition on isolated areas
TL;DR: In this paper, a shadow mask with high pattern flexibility is realized by deep reactive ion etching (RIE) on Si wafer, where the features of the mask are the presence of a mechanical alignment structure and of patterns with isolated islands inside them.
Journal ArticleDOI
FPGA-Based Decentralized Control of Arrayed MEMS for Microrobotic Application
TL;DR: A decentralized decision-making strategy using field-programmable gate array (FPGA) technology as a prototype for an integrated controller of a microelectromechanical systems (MEMS) array for air-flow planar micromanipulation.