Temperature probes for measuring the temperature of objects are disclosed. The temperature probes include a housing and a tip in thermal contact with an end of the housing. The tip is adapted to contact a surface of the object whose temperature is to be measured by the temperature probe. A portion of the housing in contact with the tip has a high thermal resistance effective to thermally isolate the tip from an adjacent portion of the housing. A sensor is located inside of the housing and adapted to measure the temperature of the tip.

Temperature probes having a thermally isolated tip

A mobile communication method in a mobile communication system including a plurality of radio access technologies, the mobile communication method comprising the steps of notifying, from a mobile station to an access node in a first radio access technology of a target for connection, a desired call type for communication, notifying, from a mobile exchange station in the first radio access technology to the access node in the first radio access technology, a radio access capability of the mobile station, determining, at the access node in the first radio access technology, whether or not a radio access technology of a target for connection of the mobile station is to be switched from the first radio access technology to a second radio access technology, on the basis of the desired call type for communication notified and the radio access capability of the mobile station, making, from the access node in the first radio access technology, an instruction to the mobile station, when determining that the radio access technology of a target for connection of the mobile station is to be switched from the first radio access technology to the second radio access technology, the instruction instructing the switching, and transmitting, from the mobile station to an access node in the second radio access technology, a connection request signal, in accordance with the instruction from the access node in the first radio access technology.

Mobile communication method, mobile exchange station, radio base station and mobile station

A method and apparatus for measuring a substrate temperature during a thermal process are provided. In one embodiment, an apparatus for measuring a substrate temperature during a thermal process includes an evacutable chamber, a substrate heater positioned to heat a substrate disposed in the chamber, and a sensor positioned to receive energy transmitted through the substrate while the substrate is heated by the substrate heater, wherein the sensor is configured to detect a metric indicative of transmittance. In another embodiment, a method for measuring a substrate temperature includes heating a substrate disposed in a chamber, detecting a change in transmittance of the substrate while heating, and determining a temperature of the substrate based on the change in transmittance.

Substrate temperature measurement by infrared transmission

A remote, noncontact temperature determination method and apparatus is provided, which is operable to determine the temperature of a conducting member forming a part of or in operative thermal communication with an object of interest. The method comprises the steps of first inducing a closed vortex eddy current (28) in a conducting member (16, 38, 44) by subjecting the member (16, 38, 44) to a magnetic field, such that the corresponding eddy current magnitude changes exponentially over time. A characteristic time constant of the exponential current magnitude changes is then determined, and this is used to calculate the temperature of the object. The apparatus (24) includes a field transmitting coil (14) coupled with a waveform generator (12) for inducing the eddy current (28), and a field receiving coil assembly (18) which detects the corresponding magnetic field induced by the eddy current (28). Using the invention, temperature determinations can be made which are substantially independent of the relative distance and/or angular orientation between the conducting member (16, 38, 44) and the field receiving coil assembly (18).

Eddy current thermometer

A temperature measuring device includes a temperature-responsive element that mechanically moves a first inductive assembly component relative to a second inductive assembly component in response to temperature changes. The movement of the first inductive assembly component relative to the second inductive assembly component generates a change in a local eddy current pattern that corresponds to the sensed temperature.

Temperature measurement device

The invention provides a method and apparatus for measuring temperature of a conductive film or coating on a non-conductive substrate or on a substrate having conductivity significantly lower than that of the film or coating. The temperature is measured with the use of an inductive sensor as at least one of electrical characteristics of the film or coating the relation of which with the temperature is known. The invention is intended for use in processes that involve heating of the conductive film or coating, e.g., annealing. The sensor is located on the side of the object-holding chuck opposite to the object but at a distance from the object that provides sensitivity of the sensor. A distinguishing feature of the invention is a shield formed from a layer of a dielectric-liquid that is permeable to electromagnetic waves but resistant to permeation of heat flow. This shield is arranged between the aforementioned conductive film or coating on a semiconductive substrate and the inductive sensor for shielding the sensor against influence of heat developed in the processing chamber. Preferably, the sensor is an inductive resonance-type sensor.

Matt Fauss

Papers

Method and apparatus for measuring temperature with the use of an inductive sensor