Matthias Roth

TL;DR: In this article, a flatness-based feed forward control method using jerk-limited trajectories to reduce undesired oscillations is presented for open-loop and closed-loop control for quasi-static microscanners.

TL;DR: In this paper, an open loop control approach with analog impedance feedback damping for quasistatic MEMS microscanners based on electrostatic comb transducers is presented, which makes use of a model-based design approach resulting in a nonlinear adaptive prefilter.

TL;DR: This paper presents the application of a real-time closed-loop control for the quasistatic axis of electrostatic micro scanning mirrors, implemented on a dSPACE system using an optical feedback, and compares linear and different nonlinear closed- loop control strategies as well as two observer variants for state estimation.

TL;DR: In this paper, the phase and amplitude spatial light modulator arrangement is adapted to produce a light field which is adjustable in magnitude and phase by adjusting an optical property in several areas of a phase element.

TL;DR: In this paper, a tilt-type micro mirror array (MMA) was proposed for high-speed phase manipulation at high-resolution optical systems with high frame rate capabilities, where the standard application is grayscale amplitude control.