M
Michael Kotelyanskii
Researcher at Brown University
Publications - 1
Citations - 12
Michael Kotelyanskii is an academic researcher from Brown University. The author has contributed to research in topics: Surface acoustic wave & Surface acoustic wave sensor. The author has an hindex of 1, co-authored 1 publications receiving 12 citations.
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Patent
Substrate analysis using surface acoustic wave metrology
TL;DR: In this paper, a system for imposing and analyzing surface acoustic waves in a substrate to determine characteristics of the substrate is described, and the arrangement of optical elements and arrangements for imposing the acoustic wave in the substrate are described.