M
Michael P. Woo
Researcher at Motorola
Publications - 1
Citations - 52
Michael P. Woo is an academic researcher from Motorola. The author has contributed to research in topics: Chemical-mechanical planarization & Layer (electronics). The author has an hindex of 1, co-authored 1 publications receiving 52 citations.
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Patent
Method for forming a multi-layer semiconductor device using selective planarization
TL;DR: Selective planarization as discussed by the authors is a method for fabricating a multi-layer semiconductor device using a photoresist mask patterning and developed to form a window which exposes an area between the conductive members.