scispace - formally typeset
Search or ask a question

Showing papers by "Miro Zeman published in 1991"


Book ChapterDOI
01 Jan 1991
TL;DR: The role of hydrogen dilution of the gas mixtures of silane and germane on the growth and the structural and photo-electrical properties of a-SiGe:H alloys was studied in this article.
Abstract: The role of hydrogen dilution of the gas mixtures of silane and germane on the growth and the structural and photo-electrical properties of a-SiGe:H alloys was studied. Hydrogen dilution was found to be of major importance to grow a-SiGe:H films with highly improved photo-electrical properties, which are suitable for device applications. DOS around midgap was studied by CPM and SCLC. DOS increases with higher Ge concentration in the films, which also affects the distribution of states in the gap.

1 citations


Journal ArticleDOI
TL;DR: In this article, the effect of hydrogen dilution of the gas mixtures of silane and germane on the growth and the structural, optical and electrical properties of a-SiGe:H alloys was studied.