N
Naoki Okamoto
Researcher at Osaka Prefecture University
Publications - 69
Citations - 377
Naoki Okamoto is an academic researcher from Osaka Prefecture University. The author has contributed to research in topics: Thin film & Copper. The author has an hindex of 10, co-authored 69 publications receiving 359 citations.
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Journal ArticleDOI
High-Speed Through Silicon Via(TSV) Filling Using Diallylamine Additive
Journal ArticleDOI
High Speed Through Silicon Via Filling by Copper Electrodeposition
Journal ArticleDOI
Organic Electroluminescence Device Based on an Electrodeposited Poly(3‐substituted thiophen) Film
Tetsuya Osaka,Shinichi Komaba,Kenichiro Fujihana,Naoki Okamoto,Toshiyuki Momma,Norihiko Kaneko +5 more
TL;DR: An electrochemically deposited composite film of poly(3-substituted thiophen) and insulating nitrile butadiene rubber (NBR) was used as the emission layer of a polymer electroluminescence (EL) device as mentioned in this paper.
Journal ArticleDOI
Single Diallylamine-Type Copolymer Additive Which Perfectly Bottom-Up Fills Cu Electrodeposition
Journal ArticleDOI
Correlation between Cu (I)-complexes and filling of via cross sections by copper electrodeposition
Abstract: In the manufacture of metal interconnects for semiconductor devices, trenches and vias in dielectric layers on the Si wafer are filled by copper electrodeposition. The acceleration of deposition at the bottom of trenches and vias is a key to the bottom-up filling of these high aspect ratio cavities. We report the detection of this acceleration effect by rotating ring disk electrode experiments. The Cu (I)-complex, which forms on the disk electrode, was captured as a current (Iring) on the ring electrode. Iring increased in periodic reverse pulse current mode, as compared to direct or pulse current. The periodic reverse pulse current produced the most bottom-up filling based on microscopic observations of via cross sections. Iring increased with the additions of Cl−, which also produced greater bottom-up filling. Iring increased with additions of SPS, which were also found to improve bottom-up filling.