Showing papers by "Ondrej L. Krivanek published in 1995"
TL;DR: In this paper, the authors explore the attainable spatial resolution in the elemental maps theoretically and experimentally, and suggest optimized set-up procedures for maximizing the resolution of the resolution.
Abstract: SUMMARY
Imaging filters developed over the last few years permit rapid elemental mapping by energy-filtering transmission electron microscopy (EFTEM), with resolution and sensitivity limited primarily by the sample and by the TEM. We explore the attainable spatial resolution in the elemental maps theoretically and experimentally, and suggest optimized set-up procedures for maximizing the resolution. The chromatic aberration of the objective lens of the microscope is shown to be a major limit. Its influence can be minimized by using small energy intervals and limited collection angles, but this is done at the cost of decreased collection efficiency. Resolution of better than 1 nm and sensitivities to less than a monolayer of elements with favourable edges are readily attainable in elemental maps obtained with acquisition times of 40 s total and less. Resolution better than 0·5 nm should be attainable with further optimization of the acquisition parameters.
107 citations
TL;DR: It is shown that the filter offers several important advantages over currently existing in-column filters, particularly in the areas of imaging at low magnifications, attainable collection efficiency, energy resolution, and general spectroscopic operation.
77 citations
TL;DR: In this article, the effect of 3-fold astigmatism on image contrast was explored through image simulation, and it was shown that the effect depends on the ratio G (C s 3/4 λ 1/4 ) and is strongest for large G and small C s.
32 citations
TL;DR: An imaging filter suitable for energy-filtered electron microscopy at up to 1.25 MeV has been designed and built in this article, which corrects all important aberrations and distortions in both the spectrum and image planes to second order.
21 citations
TL;DR: In this paper, a simple technique for measuring the primary energy of a transmission electron microscope (TEM) using an electron energy-loss spectrometer was described, which was checked against a measurement based on simulating a convergent beam diffraction pattern, and found to be accurate to better than 0.1%.
2 citations