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P. Dutta

Researcher at Solid State Physics Laboratory

Publications -  1
Citations -  11

P. Dutta is an academic researcher from Solid State Physics Laboratory. The author has contributed to research in topics: Dopant & Spreading resistance profiling. The author has an hindex of 1, co-authored 1 publications receiving 11 citations.

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Measurement of shallow dopant impurity profile in silicon using anodic sectioning and Lange method of Hall measurement

TL;DR: In this article, a new method has been given in this paper which does not require the knowledge of mobility data and the profile generated by this method is compared with the profile obtained with the help of spreading resistance probe and the two profiles agree very well within the experimental error.