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P. J. Burnett
Researcher at University of Cambridge
Publications - 4
Citations - 375
P. J. Burnett is an academic researcher from University of Cambridge. The author has contributed to research in topics: Ion implantation & Indentation hardness. The author has an hindex of 4, co-authored 4 publications receiving 373 citations.
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Surface softening in silicon by ion implantation
P. J. Burnett,Trevor F. Page +1 more
TL;DR: Load-variant microhardness tests have been used to investigate the hardness behavior of ion-implanted (1 1 1) silicon wafers as mentioned in this paper, and it is concluded that the amorphous layer produced by implantation appears to show no variation of micro-hardness with load and has a hardness typically between 400 and 700 VHN.
Journal ArticleDOI
Changing the surface mechanical properties of silicon and α-Al2O3 by ion implantation
P. J. Burnett,Trevor F. Page +1 more
TL;DR: In this paper, it was found that low-load microhardness (<50 gf) was sensitive to the thickness of the amorphous layer produced by implantation into both silicon and sapphire.
Journal ArticleDOI
An investigation of ion implantation-induced near-surface stresses and their effects in sapphire and glass
P. J. Burnett,Trevor F. Page +1 more
TL;DR: In this paper, the authors used both cantilever bending and indentation fracture techniques to study the generation of near-surface compressive stresses by ion-implantation into sapphire and glass.
Journal ArticleDOI
The charge state of titanium ions implanted into sapphire: an EXAFS investigation
TL;DR: In this paper, the authors used X-ray absorption near-edge structure (XANES) and extended Xray absorption fine structure (EXAFS) to study the charge states and atomic environments of Ti+ ions implanted into a single crystal sapphire substrate.