P
P. J. Stiles
Publications - 1
Citations - 9
P. J. Stiles is an academic researcher. The author has contributed to research in topics: Nitride & Polycrystalline silicon. The author has an hindex of 1, co-authored 1 publications receiving 9 citations.
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Comparison of pulsed laser and furnace annealing of nitrogen‐implanted silicon
TL;DR: In this article, the authors studied pulsed ruby laser and furnace annealing of high-dose (D>1017 N/cm2) 50-keV nitrogen-implanted silicon using Rutherford backscattering and channeling, transmission electron microscopy, and infrared transmission spectroscopy.