Disclosed is an acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and an alternating frame region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The alternating frame region is on one of the first and second electrodes.

Acoustic resonator performance enhancement using alternating frame structure

Film bulk acoustic resonators (FBARs) stacked FBARs (SBARS) including at least two curved edges are disclosed.

Piezoelectric resonator structures and electrical filters

Film bulk acoustic resonators (FBARs) having frame elements and filters including the resonators are described.

Piezoelectric resonator structures and electrical filters having frame elements

An acoustic resonator comprises a first electrode a second electrode and a piezoelectric layer disposed between the first and second electrodes. The acoustic resonator further comprises a reflective element disposed beneath the first electrode, the second electrode and the piezoelectric layer. An overlap of the reflective element, the first electrode, the second electrode and the piezoelectric layer comprises an active area of the acoustic resonator. The acoustic resonator also comprises a bridge adjacent to a termination of the active area of the acoustic resonator.

Acoustic resonator structure comprising a bridge

An acoustic resonator comprises a first electrode and second electrode comprising a plurality of sides. At least one of the sides of the second electrode comprises a cantilevered portion. A piezoelectric layer is disposed between the first and second electrodes. An electrical filter comprises an acoustic resonator.

Acoustic resonator structure having an electrode with a cantilevered portion

An electric filter comprises a plurality of thin film bulk acoustic resonators arranged in series and in parallel which have different thicknesses of one or more non-piezoelectric layers, for example top electrode.

Thin film bulk acoustic resonator filters with a piezoelectric layer of lead scandium tantalum oxide

Multiple thin film bulk acoustic resonators (10, 11) configured in series (10) and parallel (11) within a coplanar waveguide line structure provides a compact ladder filter. The resonators (10, 11) are formed over an opening (28) in a substrate (20) and connected to associated circuitry by one or more transmission lines formed on the substrate (20). The arrangement of the resonators (10, 11) between the ground and signal lines of a coplanar line structure provides a means of minimising the area of the filter. Embedding a ladder filter within the coplanar transmission line structure eliminates the need for wire bonds, thus simplifying fabrication. Embodiments for 2×2, and hither order filters are described.

Film bulk acoustic resonator filters with a coplanar waveguide

A ladder-type film bulk acoustic resonator (FBAR) filter comprises two series FBARs and two parallel FBARs. Each FBAR has a top electrode, a bottom electrode, and a piezoelectric layer sandwiched between the top and bottom electrodes. The top electrodes of the two series FBARs form part of a signal line of a coplanar waveguide transmission line. The top electrodes of the two series FBARs are connected to associated circuitry. The two series FBARs have a common bottom electrode.

Film bulk acoustic resonator filter

An electric filter comprises a plurality of thin film bulk acoustic resonators (10, 11) arranged in series and in parallel which have different thicknesses (T) of one or more non-piezoelectric layers, for example top electrode (24).

Improvements to filters

An electric filter comprises a plurality of thin film bulk acoustic resonants (10, 11) arranged in series and in parallel which have electrodes (24, 25) of different working area (L) and optionally a piezoelectric layer (23) of different thickness (T).

Paul B. Kirby

Papers

Thin film bulk acoustic resonator filters with a piezoelectric layer of lead scandium tantalum oxide

Film bulk acoustic resonator filters with a coplanar waveguide

Film bulk acoustic resonator filter

Improvements to filters

Electric filter comprising a plurality of thin film bulk acoustic resonators