A measurement system has a surface sensing device mounted on an articulating probe head, which in turn is mounted on a coordinate positioning apparatus. The surface sensing device is moved relative to a surface by driving at least one of the coordinate positioning apparatus and probe head in at least one axis to scan the surface. The surface sensing device measures its distance from the surface and the probe head is driven to rotate the surface sensing device about at least one axis in order to control the relative position of the surface sensing device from the surface to within a predetermined range in real time.

Method for scanning the surface of a workpiece

Rotational motions between a displacement-measuring probe and an optical test surface define a spherical or near spherical datum surface against which measurements of the probe are taken. The probe has a measurement axis that is maintained substantially normal to the optical test surface during the course of measurement.

Measurement of form of spherical and near-spherical optical surfaces

A scoring device is described herein that applies a constant force while scoring a piece of material so that there is a consistent score quality (or vent depth) within the scored piece of material. In one embodiment, the piece of material is a bowed shaped glass sheet that is supported by a conformable nosing device which has been configured to have a bowed shape that substantially matches the bowed shape of the glass sheet.

Constant force scoring device and method for using same

Provided are a measuring section (210) including a vibrating contact-type probe having a measuring force detection circuit (219) which detects a measuring force acting to the contact portion (212); a moving unit (a three-dimensional drive mechanism (300), a vertical movement drive mechanism (220)) that moves the measuring section (210) relative to a workpiece surface (S); and a drive control unit (400) that controls the moving unit based on the magnitude of the measuring force output from the measuring force detection circuit (219). The drive control unit (400) includes: a scanning-measurement control section (410) that moves for scanning the contact portion along the workpiece surface (S) with the measuring force maintained at the designated scanning measuring force; and a touching-measurement control section (420) that conducts touching-measurements on the workpiece surface (S) in a repeated manner, in the measurements the contact portion (212) being adapted to intermittently contact the workpiece surface (S) at a touch detecting measuring force.

Surface profile measuring instrument

An actuator using a piezoelectric element and a method of driving the same. The actuator includes at least one piezoelectric cell moving by displacement according to an input voltage, at least one piezoelectric sensor sensing the displacement of the at least one piezoelectric cell, an error detector detecting an error in the at least one piezoelectric sensor, and a feedback signal generator generating a feedback signal corresponding to the error, thereby performing micromirror driving and sensing.

Actuator using piezoelectric element and method of driving the same

An apparatus for profiling the surface of a workpiece, including a probe adapted to make contact with the surface of a workpiece, a sensor for determining or deriving the force between the probe and the workpiece surface, an actuator that adjusts the position of the probe along an axis, which is generally perpendicular to the surface of the workpiece, in order to maintain a constant force between the probe and the surface, and a closed control loop, including a controller that controls the operation of the actuator based on information from the sensor.

Pavan Jain

Papers

Method and apparatus using a closed loop controlled actuator for surface profilometry