P
Prabhakar B. Ghate
Researcher at Texas Instruments
Publications - 3
Citations - 50
Prabhakar B. Ghate is an academic researcher from Texas Instruments. The author has contributed to research in topics: Electrode & Temperature cycling. The author has an hindex of 3, co-authored 3 publications receiving 50 citations.
Papers
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Patent
Method for fabricating a thin film capacitor
TL;DR: In this paper, a process for fabricating a nonpolar low loss thin film capacitor utilizing tantalum oxide for high capacitance per unit area as a dielectric which is deposited in film form relative to a suitable substrate is described.
Patent
Maximum density interconnections for large scale integrated circuits
TL;DR: In this paper, a microelectronic integrated circuit having first and second levels of thin-film metallization separated by an insulation layer is provided with a system for electrical interconnections.
Journal ArticleDOI
Reliability Studies on the 2-Level Al/SiO2/Al System
TL;DR: In this paper, the reliability of 2-level aluminum/silicon dioxide/aluminum system has been investigated using two types of aluminum films, deposited on unheated substrates (Al-I) and on 200°C substrates(Al-II).