We survey progress over the past 25 years in the development of microscale devices for pumping fluids. We attempt to provide both a reference for micropump researchers and a resource for those outside the field who wish to identify the best micropump for a particular application. Reciprocating displacement micropumps have been the subject of extensive research in both academia and the private sector and have been produced with a wide range of actuators, valve configurations and materials. Aperiodic displacement micropumps based on mechanisms such as localized phase change have been shown to be suitable for specialized applications. Electroosmotic micropumps exhibit favorable scaling and are promising for a variety of applications requiring high flow rates and pressures. Dynamic micropumps based on electrohydrodynamic and magnetohydrodynamic effects have also been developed. Much progress has been made, but with micropumps suitable for important applications still not available, this remains a fertile area for future research.

https://microfluidics.stanford.edu/Publications/Micropumps_Cooling/Laser%20Review%20of%20Micropumps%20in%20JMM.pdf

A review of micropumps

This paper presents the development of a disposable plastic biochip incorporating smart passive microfluidics with embedded on-chip power sources and integrated biosensor array for applications in clinical diagnostics and point-of-care testing. The fully integrated disposable biochip is capable of precise volume control with smart microfluidic manipulation without costly on-chip microfluidic components. The biochip has a unique power source using on-chip pressurized air reservoirs, for microfluidic manipulation, avoiding the need for complex microfluidic pumps. In addition, the disposable plastic biochip has successfully been tested for the measurements of partial oxygen concentration, glucose, and lactate level in human blood using an integrated biosensor array. This paper presents details of the smart passive microfluidic system, the on-chip power source, and the biosensor array together with a detailed discussion of the plastic micromachining techniques used for chip fabrication. A handheld analyzer capable of multiparameter detection of clinically relevant parameters has also been developed to detect the signals from the cartridge type disposable biochip. The handheld analyzer developed in this work is currently the smallest analyzer capable of multiparameter detection for point-of-care testing.

/pdf/disposable-smart-lab-on-a-chip-for-point-of-care-clinical-46p07tt8gu.pdf

Disposable smart lab on a chip for point-of-care clinical diagnostics

This paper provides a detailed overview of developments in transducer materials technology relating to their current and future applications in micro-scale devices. Recent advances in piezoelectric, magnetostrictive and shape-memory alloy systems are discussed and emerging transducer materials such as magnetic nanoparticles, expandable micro-spheres and conductive polymers are introduced. Materials properties, transducer mechanisms and end applications are described and the potential for integration of the materials with ancillary systems components is viewed as an essential consideration. The review concludes with a short discussion of structural polymers that are extending the range of micro-fabrication techniques available to designers and production engineers beyond the limitations of silicon fabrication technology.

/pdf/new-materials-for-micro-scale-sensors-and-actuators-an-21qnaonn0l.pdf

New materials for micro-scale sensors and actuators An engineering review

Piezoelectricity in 2D van der Waals materials has received considerable interest because of potential applications in nanoscale energy harvesting, sensors, and actuators. However, in all the systems studied to date, strain and electric polarization are confined to the basal plane, limiting the operation of piezoelectric devices. In this paper, based on ab initio calculations, we report a 2D materials system, namely, the recently synthesized Janus MXY (M = Mo or W, X/Y = S, Se, or Te) monolayer and multilayer structures, with large out-of-plane piezoelectric polarization. For MXY monolayers, both strong in-plane and much weaker out-of-plane piezoelectric polarizations can be induced by a uniaxial strain in the basal plane. For multilayer MXY, we obtain a very strong out-of-plane piezoelectric polarization when strained transverse to the basal plane, regardless of the stacking sequence. The out-of-plane piezoelectric coefficient d33 is found to be strongest in multilayer MoSTe (5.7–13.5 pm/V depending on t...

Large In-Plane and Vertical Piezoelectricity in Janus Transition Metal Dichalchogenides

This paper briefly reviews recent research and developments of micropump designs with a particular emphasis on mechanical micropumps and summarizes their applications in biomedical fields. A comprehensive description of the actuation schemes, flow directing concepts and liquid chamber configurations for micro pumping is provided with illustrative diagrams. Then, a comparative study of current mechanical micropump designs highlighting their advantages and limitations for various applications is presented, based on performance criteria such as actuation voltage and power consumption, ranges of operating frequency and maximum flow rate and backpressure. This study compiles and provides some basic guidelines for selection of the actuation schemes and flow rate requirements in biomedical applications. Different micropumps in biomedical applications, such as blood transport and drug delivery also have been reviewed.

Current micropump technologies and their biomedical applications

A new design for a silicon-based micropump is described. Passive cantilever valves are produced by boron etch stop and fusion bonding. Tests of these valves show good performance, as no flow could be detected in the reverse direction. Initial experiments on a thick-film screen printed piezoelectric membrane actuator were undertaken. A study of suitable inks for electrodes on different insulation layers on silicon yielded silicon dioxide and cermet gold ink as the most satisfactory combination. Deflection measurements of a mm PZT (lead zirconate titanate) - bimorph membrane gave movement at an applied voltage of 100 V. A quasi-static simulation package of the flow through a micropump is also presented. The valve action is simulated using ANSYS coupled with FLOW3D. The piezoelectric membrane deflection is simulated with ANSYS. A differential equation for the combined actuation of membrane and valves is solved numerically with Maple. Pump rates of up to and a maximum backpressure of up to 70 kPa for a driving voltage of 40 V have been modelled using bulk values for PZT-5H. A pump rate of up to and a maximum backpressure of up to 35 kPa at 100 V driving voltage are predicted using thick-film parameters extracted from the measurements.

https://iopscience.iop.org/article/10.1088/0957-0233/8/1/008/pdf

R. Maas

Papers

A novel micropump design with thick-film piezoelectric actuation

Thick-film printing of PZT onto silicon