An object is to provide a method for manufacturing a semiconductor device, in which the number of photolithography steps can be reduced, the manufacturing process can be simplified, and manufacturing can be performed with high yield at low cost A method for manufacturing a semiconductor device includes the following steps: forming a semiconductor film; irradiating a laser beam by passing the laser beam through a photomask including a shield for shielding the laser beam; subliming a region which has been irradiated with the laser beam through a region in which the shield is not formed in the photomask in the semiconductor film; forming an island-shaped semiconductor film in such a way that a region which is not irradiated with the laser beam is not sublimed because it is a region in which the shield is formed in the photomask; forming a first electrode which is one of a source electrode and a drain electrode and a second electrode which is the other one of the source electrode and the drain electrode; forming a gate insulating film; and forming a gate electrode over the gate insulating film

Method for Manufacturing Semiconductor Device

A memory including memory cells having active and passive layers may store multiple information bits. The active layer may include an organic polymer that has a variable resistance based on the movement of charged species (ions or ions and electrons) between the passive layer and the active layer. The passive layer may be a super-ionic material that has high ion and electron mobility. The active layer may be self-assembled from a monomer in a liquid or gas.

Memory device with active passive layers

The present invention provides a semiconductor device capable of preventing deterioration in carrier mobility of a semiconductor layer, which is a quality of the interface between the semiconductor layer and an insulating layer, and a method of manufacturing the semiconductor device. In the semiconductor device, an interface layer is provided between a semiconductor layer made of active polycrystalline silicon and an insulating layer made of silicon oxide. The nitrogen element in silicon nitride diffuses into the semiconductor layer made of active polycrystalline silicon to compensate for lattice strain of the active polycrystalline silicon film, to satisfy the desired quality of the interface between the semiconductor layer and the insulating layer.

Semiconductor device and method of manufacturing the same

There is provided a monolithic three dimensional TFT mask ROM array. The array includes a plurality of device levels. Each of the plurality of device levels contains a first set of enabled TFTs and a second set of partially or totally disabled TFTs.

TFT mask ROM and method for making same

A shielded three-terminal flat-through EMI/energy dissipating filter includes an active electrode plate through which a circuit current passes between a first terminal and a second terminal, a first shield plate on a first side of the active electrode plate, and a second shield plate on a second side of the active electrode plate opposite the first shield plate. The first and second shield plates are conductively coupled to a grounded third terminal. In preferred embodiments, the active electrode plate and the shield plates are at least partially disposed with a hybrid flat-through substrate that may include a flex cable section, a rigid cable section, or both.

Shielded three-terminal flat-through EMI/energy dissipating filter

A CMOS memory cell including PMOS and NMOS transistors with a common floating gate. The CMOS memory cell includes a first capacitor connecting a first control voltage to the common floating gate and a second tunneling capacitor connected from the common floating gate to the source of the NMOS transistor. The tunneling capacitor includes a tunneling oxide region utilized to charge or discharge the floating gate during program or erase. The CMOS cell further includes a pass transistor with a source to drain path connecting the source of the NMOS transistor to a second control voltage.

CMOS EEPROM cell with tunneling window in the read path

An integrated circuit device and manufacturing process wherein a first region is formed in a substrate with a dopant that enhances oxide formation and a second region is formed in the substrate with a dose of nitrogen that retards oxide formation. An oxide layer is grown over the first and the second regions and over a third region of the substrate such that the first, second, and third regions yield differing thicknesses of the oxide layer.

Method of forming multiple gate oxide thicknesses on a wafer substrate

An apparatus and method, the apparatus including an NMOS pass gate separating NMOS and PMOS transistors of a CMOS memory cell configured for tunneling during program and erase through the NMOS and PMOS transistors. The additional NMOS pass gate enables the CMOS memory cell to be utilized as a memory cell in a programmable logic device (PLD). The method includes steps for programming and erasing CMOS memory cells to prevent current leakage. The steps include applying specific voltages to the sources of the NMOS and PMOS transistors during program and erase, rather than leaving either source floating. Such voltages can be applied during program or erase without additional pass gates being connected to the sources of the PMOS or NMOS transistors of individual CMOS cells, or the additional pass gate provided between the drains of the PMOS and NMOS as in the described apparatus.

CMOS memory cell with tunneling during program and erase through the NMOS and PMOS transistors and a pass gate separating the NMOS and PMOS transistors

A shallow trench isolation structure and a method for forming the same for use with non-volatile memory devices is provided so as to maintain sufficient data retention thereof. An epitaxial layer is formed on a top surface of a semiconductor substrate. A barrier oxide layer is formed on a top surface of the epitaxial layer. A nitride layer is deposited on a top surface of the barrier oxide layer. Trenches are formed through the epitaxial layer and the barrier oxide layer to a depth greater than 4000 Å below the surface of the epitaxial layer so as to create isolation regions in order to electrically isolate active regions in the epitaxial layer. A liner oxide is formed on sidewalls and bottom of the trenches to a thickness between 750 Å to 1500 Å. As a result, leakage current in the sidewalls are prevented due to less thinning of the liner oxide layer by subsequent fabrication process steps.

Data retention of EEPROM cell with shallow trench isolation using thicker liner oxide

An integrated circuit ("IC") having three different oxide layer thicknesses and a process for manufacturing the IC using a single oxide growth step is provided. A first region is formed on a substrate surface with oxidation enhancing properties. A second region is formed on the substrate surface with a dose of nitrogen that retards oxidation. An oxide layer is grown from the first and the second regions and a third region of the substrate such that the first, second, and third regions yield a first oxide layer for the capacitor, a second oxide layer for the read transistor and a third oxide layer for the write transistor.

Radu Barsan

Papers

CMOS EEPROM cell with tunneling window in the read path

Method of forming multiple gate oxide thicknesses on a wafer substrate

CMOS memory cell with tunneling during program and erase through the NMOS and PMOS transistors and a pass gate separating the NMOS and PMOS transistors

Data retention of EEPROM cell with shallow trench isolation using thicker liner oxide

Integrated circuit having, and process providing, different oxide layer thicknesses on a substrate