http://wwwlabs.uhnresearch.ca/biophotonics/staff_papers/vitkin/OCT_MEMS_Opt_Comm.pdf

Dynamic focus control in high-speed optical coherence tomography based on a microelectromechanical mirror

A method of forming device isolation regions on a trench-formed silicon substrate and removing residual carbon therefrom includes providing a flowable, insulative material constituted by silicon, carbon, nitrogen, hydrogen, oxygen or any combination of two or more thereof; forming a thin insulative layer, by using the flowable, insulative material, in a trench located on a semiconductor substrate wherein the flowable, insulative material forms a conformal coating in a silicon and nitrogen rich condition whereas in a carbon rich condition, the flowable, insulative material vertically grows from the bottom of the trenches; and removing the residual carbon deposits from the flowable, insulative material by multi-step curing, such as O2 thermal annealing, ozone UV curing followed by N2 thermal annealing.

Device isolation technology on semiconductor substrate

The invention relates to methods and apparatus for forming images on a display utilizing a control matrix to control the movement of MEMs-based light modulators.

Display methods and apparatus

Circuits for controlling display apparatus

Display devices incorporating shutter-based light modulators are disclosed along with methods of manufacturing such devices. The methods are compatible with thin-film manufacturing processes known in the art and result in displays having lower power-consumption.

Display apparatus and methods for manufacture thereof

We have built a 1000‐μm-diameter silicon nitride deformable mirror for focus-control applications, using micro-optoelectromechanical systems technology. We achieved variable focal lengths from 36 to 360 mm while maintaining zero primary spherical aberration, using a maximum control voltage of 100 V. Active control of spherical aberration of approximately two waves at 660 nm was demonstrated.

Micromachined silicon nitride deformable mirrors for focus control.

Stiffened surface micromachined structures and a method to fabricate the same. A silicon substrate (10) is first etched to produce a mold containing a plurality of trenches or grooves (14) in a lattice configuration. Sacrificial oxide (15) is then grown on the silicon substrate (10) and then a stiffening member (16) (silicon nitride) is deposited over the surface of the substrate, thereby backfilling the grooves with silicon nitride. The silicon nitride is patterned to form mechanical members and metal (40) is then deposited and patterned to form the leads and capacitors for electrostatic actuation of mechanical members. The underlying silicon and sacrificial oxides are removed by etching the mold from underneath the fabricated micromachined devices, leaving free-standing silicon nitride devices with vertical ribs. The devices exhibit increased out-of-plan bending stiffness because of the presence of stiffening ribs. Silicon nitride biaxial pointing mirrors with stiffening ribs are also described.

Stiffened surface micromachined structures and process for fabricating the same

Gold-coated silicon nitride mirrors designed for two orthogonal rotations were fabricated. The devices were patterned out of nitride using surface micromachining techniques, and then released by a sacrificial oxide etch and bulk etching the silicon substrate. Vertical nitride ribs were used to stiffen the members and reduce the curvature of the mirrored surfaces due to internal stress in the nitride and the metal layer. This was accomplished by initially etching the silicon substrate to form a mold that was filled with nitride to create a stiffening lattice-work to support the mirrored section. Mirror diameters ranging from 100 µm to 500 µm have been fabricated, with electrostatic actuation used to achieve over four degrees of tilt for each axis.

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Silicon nitride biaxial pointing mirrors with stiffening ribs

A compact confocal imaging instrument is described that makes use of a high-performance bi-axial Silicon torsion mirror, in concert with a reflective dynamic parabolic membrane mirror to provide 3D beam scanning. This beam scan engine is incorporated into a confocal imaging Raman spectrometer under development for exploration of Martian rocks and soil, designed to achieve optical resolution of 1 micrometers at (lambda) equals 850 nm, with a field of view of 300 micrometers and focus control of more than 200 micrometers . Fast x-y beam scanning is achieved with the bi-axial scanner, while the parabolic membrane provides both static and dynamic focus control for gross instrument focus as well as on-the fly field curvature correction or substrate contour tracing. In this paper we describe the MOEM elements as well as on-the-fly curvature correction or substrate contour tracing. In this paper we describe the MOEM elements as well as the overall instrument architecture. We also present initial imaging results using the torsion mirror scanner, and we describe the dynamic focus element fabrication, modeling and preliminary experimental characterization.

Miniature high-resolution imaging system with 3D MOEMS beam scanning for Mars exploration

A compact confocal imaging instrument is described that makes use of a high-performance bi-axial Silicon torsion mirror, in concert with a reflective dynamic parabolic membrane mirror to provide three-dimensional beam scanning. This beam scan engine is incorporated into a confocal imaging Raman spectrometer under development for exploration of Martian rocks and soil, designed to achieve optical resolution of 1 μm at λ = 850 nm, with a field of view of 300 μm and focus control of more than 200 μm. Fast x-y beam scanning is achieved with the bi-axial scanner, while the parabolic membrane provides both static and dynamic focus control (z-position) for gross instrument focus as well as on-the-fly field curvature correction or substrate contour tracing. In this paper we describe the MOEM elements as well as the overall instrument architecture. We also present initial imaging results using the torsion mirror scanner, and we describe the dynamic focus element fabrication, modeling and preliminary experimental characterization.

Robert A. Friholm

Papers

Micromachined silicon nitride deformable mirrors for focus control.

Stiffened surface micromachined structures and process for fabricating the same

Silicon nitride biaxial pointing mirrors with stiffening ribs

Miniature high-resolution imaging system with 3D MOEMS beam scanning for Mars exploration

Miniature high-resolution imaging system with 3-dimensional MOEMS beam scanning for mars exploration