Journal ArticleDOI
Micromachined silicon nitride deformable mirrors for focus control.
TLDR
A 1000mum-diameter silicon nitride deformable mirror for focus-control applications, using micro-optoelectromechanical systems technology, which achieved variable focal lengths from 36 to 360 mm while maintaining zero primary spherical aberration using a maximum control voltage of 100 V.Abstract:
We have built a 1000‐μm-diameter silicon nitride deformable mirror for focus-control applications, using micro-optoelectromechanical systems technology. We achieved variable focal lengths from 36 to 360 mm while maintaining zero primary spherical aberration, using a maximum control voltage of 100 V. Active control of spherical aberration of approximately two waves at 660 nm was demonstrated.read more
Citations
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Journal ArticleDOI
Dynamic focus control in high-speed optical coherence tomography based on a microelectromechanical mirror
Bing Qi,A. Phillip Himmer,L. Maggie Gordon,X.D. Victor Yang,L. David Dickensheets,I. Alex Vitkin,I. Alex Vitkin +6 more
TL;DR: In this article, a high-speed dynamic focus control system based on a microelectromechanical mirror was designed to maintain high transverse resolution over the entire depth scan, which can yield sub-optimal lateral resolution outside the focal zone for deep-imaging OCT systems.
Journal ArticleDOI
3-D MOEMS mirror for laser beam pointing and focus control
TL;DR: In this article, a biaxial torsion scan mirror with a deformable membrane surface is described, which can be deformed to a parabola with greater than 3mm sag at the membrane center.
Patent
Stiffened surface micromachined structures and process for fabricating the same
TL;DR: In this paper, a silicon substrate is first etched to produce a mold containing a plurality of trenches or grooves in a lattice configuration, and then a stiffening member (silicon nitride) is deposited over the surface of the substrate, thereby backfilling the grooves with silicon nitride.
Journal ArticleDOI
Magnetically actuated MEMS microlens scanner for in vivo medical imaging
TL;DR: Experimental studies and optical modeling have shown that this magnetically actuated MEMS scanner with a microfabricated ferromagnetic nickel platform and thermosetting polydimethylsiloxane microlens achieves a scanning range of 125 mum when actuated by an external magnetic field of 22.2x10-3 Tesla flux density.
Journal ArticleDOI
Doppler optical coherence tomography with a micro-electro-mechanical membrane mirror for high-speed dynamic focus tracking.
Victor X. D. Yang,Youxin Mao,Beau A. Standish,Nigel R. Munce,Stephanie Chiu,Daina Burnes,Brian C. Wilson,I. Alex Vitkin,Phillip A. Himmer,David L. Dickensheets +9 more
TL;DR: An elliptical microelectromechanical system (MEMS) membrane mirror is electrostatically actuated to dynamically adjust the optical beam focus and track the axial scanning of the coherence gate in a Doppler optical coherence tomography (DOCT) system at 8 kHz.
References
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Journal ArticleDOI
Silicon-micromachined scanning confocal optical microscope
TL;DR: In this paper, a miniature scanning confocal optical microscope constructed from components micromachined using silicon and fused silica is described, and the design, fabrication, and characterization of the components of the microscope as well as the assembly of the system are described.
Journal ArticleDOI
Microelectromechanical deformable mirrors
TL;DR: In this paper, a new class of silicon-based deformable mirrors is described, which are capable of correcting time-varying aberrations in imaging or beam forming applications.
Journal ArticleDOI
Large Deflections of Clamped Circular Plates Under Initial Tension and Transitions to Membrane Behavior
M. Sheploak,John Dugundji +1 more
TL;DR: In this paper, the large deflections of a clamped circular plate are investigated over a wide range of transverse loadings and initial in-plane tension loads, and the continuous transition from plate behavior to membrane behavior is described in detail, along with the development of the edge zone region where properties change rapidly.
Journal ArticleDOI
Quick focusing of imaging optics using micromachined adaptive mirrors
TL;DR: In this article, a micromachined varifocal mirror with a clear aperture of 1 cm can be controlled in a frequency band up to 75 Hz by applying control voltages in the range of 0 to 200 V.
Journal ArticleDOI
Micro-electro-mechanical deformable mirrors for aberration control in optical systems
TL;DR: In this article, the authors present results of modelling the performance of an MEM-DM for optical aberration control and conduct experiments to verify that MEM-DMs can control optical aberrations.