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Robert L. Gerlach

Researcher at Philips

Publications -  2
Citations -  55

Robert L. Gerlach is an academic researcher from Philips. The author has contributed to research in topics: Ion & Secondary ion mass spectrometry. The author has an hindex of 1, co-authored 2 publications receiving 55 citations.

Papers
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Patent

Method and apparatus for enhancing yield of secondary ions

TL;DR: In this paper, water vapor is injected through a needle that is positioned close to the sample and electrically biased to reduce interference with secondary ion collection field, which enhances the sensitivity of a secondary ion mass spectrometer.
Patent

Method and device for raising yield of secondary ion

TL;DR: In this article, the sensitivity of a secondary ion mass spectrometer (SIMS) is increased by using steam in order to raise yield of a positive secondary ion to be sputtered by a primary convergence ion beam.