R
Robert P. Mandal
Researcher at Applied Materials
Publications - 13
Citations - 1352
Robert P. Mandal is an academic researcher from Applied Materials. The author has contributed to research in topics: Dielectric & Silicon oxide. The author has an hindex of 9, co-authored 13 publications receiving 1352 citations.
Papers
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Patent
Plasma processes for depositing low dielectric constant films
David Cheung,Wai-Fan Yau,Robert P. Mandal,Shin-Puu Jeng,Kuo-Wei Liu,Yung-Cheng Lu,Michael Barnes,Ralf B. Willecke,Farhad Moghadam,Tetsuya Ishikawa,Tze Wing Poon +10 more
TL;DR: In this article, a method and apparatus for depositing a low dielectric constant film by reaction of an organosilicon compound and an oxidizing gas comprising carbon at a constant RF power level is presented.
Patent
Very low dielectric constant plasma-enhanced CVD films
TL;DR: In this paper, a method for depositing nano-porous low dielectric constant films by reacting an oxidizable silicon containing compound or mixture comprising an oxidisable silicon component and a non-silicon component having thermally liable groups with nitrous oxide, oxygen, ozone, or other source of reactive oxygen in gas-phase plasmaenhanced reaction is presented.
Patent
Cvd nanoporous silica low dielectric constant films
TL;DR: In this paper, a method and apparatus for depositing nano-porous low dielectric constant films by reaction of a silicon hydride containing compound or mixture optionally having thermally labile organic groups with a peroxide compound on the surface of a substrate.
Patent
Method of improving moisture resistance of low dielectric constant films
Wai-Fan Yau,David Cheung,Nasreen Gazala Chopra,Yung-Cheng Lu,Robert P. Mandal,Farhad Moghadam +5 more
TL;DR: In this paper, a method and apparatus for depositing a low dielectric constant film includes depositing silicon oxide based film, preferably by reaction of an organosilicon compound and an oxidizing gas at a low RF power level from about 10W to about 500W, exposing the silicon oxide-based film to water or a hydrophobic-imparting surfactant such as hexamethyldisilazane, and curing the film at an elevated temperature.
Patent
Mesoporous silica films with mobile ion gettering and accelerated processing
TL;DR: In this article, a process and an apparatus for depositing low dielectric constant films on a substrate was described, which are phosphorus doped mesoporous oxide films formed by depositing and curing a phosphorus containing sol-gel precursor to form an oxide film having interconnecting pores of uniform diameter.