R
Ryota Takagi
Publications - 1
Citations - 20
Ryota Takagi is an academic researcher. The author has contributed to research in topics: Anodic bonding & Silicon. The author has an hindex of 1, co-authored 1 publications receiving 20 citations.
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Capacitive sensor for detecting a physical value such as acceleration
TL;DR: In this article, a capacitive acceleration sensor is composed of a silicon plate, a glass plate and a substrate, and a movable portion is supported by the fixed portion through spring beams.