PatentDOI
Capacitive sensor for detecting a physical value such as acceleration
TLDR
In this article, a capacitive acceleration sensor is composed of a silicon plate, a glass plate and a substrate, and a movable portion is supported by the fixed portion through spring beams.Abstract:
A capacitive acceleration sensor is composed of a silicon plate, a glass plate and a substrate The silicon plate has a fixed portion and a movable portion supported by the fixed portion through spring beams The movable portion is moved in response to the change in the acceleration and is provided with a moving electrode thereon The glass plate is provided with a fixed electrode and anodically bonded to the silicon plate so that the fixed electrode faces the moving electrode with a predetermined gap On the glass plate, a first dummy electrode is formed at a location corresponding to the spring beams of the silicon plate The dummy electrode has a terminal portion at one end so as to be electrically connected with the silicon plate during anodic bonding of the plates On the substrate, a second dummy electrode is formed at a location corresponding to the movable portion of the silicon plate The dummy electrode, similarly, has a terminal portion at one end so as to be electrically connected with the silicon plate during anodic bonding of the silicon plate and the substrateread more
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Collision deformation sensor using a source of wave energy for use in the crush zone of a vehicle
TL;DR: A collision deformation sensor for use within the crush zone of a vehicle consists of first and second spaced apart substrates for mounting to or forming respective vehicle components, with a compressible carrier medium filling the space between the substrates.
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Multiple-axis linear accelerometer
TL;DR: In this article, a three-axis accelerometer is provided for sensing acceleration in three orthogonal axes, which includes a support substrate, fixed electrodes having fixed capacitive plates fixed to the support substrate and a movable inertial mass having movable plates capacitively coupled to the fixed plates.
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Silicon micromachined accelerometer/seismometer and method of making the same
Richard D. Martin,W. Thomas Pike +1 more
TL;DR: In this article, a silicon-based microaccelerometer for seismic application is provided using a low-resonant frequency (10 Hz), large proof mass (1 gram), and high Q suspension to achieve high sensitivity of less than 1 ng with a bandwidth a 0.05 to 50 Hz.
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MEMS Sensor with Cap Electrode
John R. Martin,Xin Zhang +1 more
TL;DR: A MEMS sensor includes a substrate having a MEMS structure movably attached to the substrate, a cap attached to a substrate and encapsulating the MEMS structures, and an electrode formed on the cap that senses movement of the structure.
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Angular accelerometer having balanced inertia mass
TL;DR: In this article, a balanced angular accelerometer is provided having a substrate, a fixed electrode with a plurality of fixed capacitive plates, and a rotational inertia mass with a central opening and substantially suspended over a cavity.
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Semiconductor chip transducer
TL;DR: In this article, a motion transducer fabricated from a semiconductor material by etched exposure and release of a resiliently suspended element is presented, where electrical sensing and/or torquing is applied to the suspended element to produce mass or vibrational sensitivities to provide a transduzer for various physical parameters.
Patent
Capacitive type converter device
TL;DR: In this paper, a capacitive type converter device, such as used for measuring pressure, comprising first and second rectifying circuits, comprising an operational amplifier with a non-inverting input terminal connected to a reference point, is described.