S
S. Aachboun
Publications - 1
Citations - 137
S. Aachboun is an academic researcher. The author has contributed to research in topics: Etching (microfabrication) & Deep reactive-ion etching. The author has an hindex of 1, co-authored 1 publications receiving 131 citations.
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Deep anisotropic etching of silicon
S. Aachboun,P. Ranson +1 more
TL;DR: In this article, a high density plasma helicon reactor using SF6/O2 chemistry and a cryogenic chuck has been used for etching very deep anisotropic trenches (∼100 μm) with high aspect ratios (depth/width) and high etch rates.