S
S. L. Lai
Publications - 1
Citations - 90
S. L. Lai is an academic researcher. The author has contributed to research in topics: Etching (microfabrication) & Plasma etching. The author has an hindex of 1, co-authored 1 publications receiving 84 citations.
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Aspect ratio dependent etching lag reduction in deep silicon etch processes
TL;DR: In this paper, a physical model is presented to describe the time division multiplex (TDM) plasma etch processes and thereafter the experimental results on aspect ratio dependent etching (ARDE) lag reduction.