S
S. Okamura
Researcher at University of Tokyo
Publications - 1
S. Okamura is an academic researcher from University of Tokyo. The author has co-authored 1 publications.
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Proceedings ArticleDOI
Micropatterning process of ferroelectric oxides by irradiation of an electron beam on metal naphthenate films
TL;DR: In this paper, fine micropatterns with linewidth of 0.35 /spl mu/m were fabricated by irradiation with an electron beam of metal naphthenate films, being precursors of ferroelectric oxides, and development with a solvent.