S
Sang Soo Choi
Publications - 6
Citations - 39
Sang Soo Choi is an academic researcher. The author has contributed to research in topics: Photomask & Photolithography. The author has an hindex of 2, co-authored 6 publications receiving 39 citations.
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Patent
Device and method for cleaning photomask
TL;DR: In this article, the photomask is heat treated to remove residual ions on a surface thereof and to induce curing and oxidation of Cr and MoSiON layers, thereby preventing diffusion of the ions.
Patent
Phase shift mask for preventing haze
TL;DR: In this article, residual ions, which are considered a factor of occurrence of haze which is a growth defect of a surface of a photomask during a photolithography step of a wafer process, are controlled in order to change the content of the surface of the phase shift mask.
Patent
Method for cleaning a photmask
TL;DR: In this paper, the photomask is heat treated to remove residual ions on a surface thereof and to induce curing and oxidation of Cr and MoSiON layers, thereby preventing diffusion of the ions.
Patent
Photomask washing device and washing method
TL;DR: In this article, a photomask washing device and a washing method that reduce optical characteristic variation of a phase shift mask by carrying out a heat treatment after a washing stage, and then removing residual ions left on the surfaces of the mask to prevent haze.
Patent
Device for cleaning a photomask
TL;DR: In this paper, the photomask is heat treated to remove residual ions on a surface thereof and to induce curing and oxidation of Cr and MoSiON layers, thereby preventing diffusion of the ions.