The objective of this thesis is to design MEMS magnetic actuator for MEMS FTIRS. The actuator consists of moving part and fixed part. The moving part uses rotation-to-translation motion conversion mechanism to achieve large translation, which includes four trapezoidal plates, central ring, anchoring springs and connection springs. The fixed part of the actuator consists of four solenoids. The actuator can be integrated with separately fabricated micromirror plate to achieve high surface quality translation micromirror for FTIRS. The actuator is capable of eliminating titling by controlling the four solenoids individually. The MEMS magnetic actuator has been designed and simulated to be able to output a static displacement of 370micrometers. The stress has been analyzed for the moving part of the actuator. The actuator fixed part has been designed. Dynamic analysis has been conducted for the moving part of the actuator. The moving part of the actuator has been fabricated using MetalMUMPs.

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Design of MEMS magnetic actuator for MEMS fourier transform infrared spectrometer

A wide variety of MEMS micro-mirrors are being developed for various optical applications. One such application is Fourier Transform Spectrometry (FTS). The design, process optimization and fabrication of a micro-mirror for this application is presented. Large, non-tilting displacements of mirrors are required to achieve high FTS resolution. In order to obtain this without using Deep Reactive Ion Etching (DRIE), the micro-mirrors were fabricated on silicon using bulk micromachining techniques. This paper will present the process developed for fabrication of the mirror with the required specifications. In addition, results of the FTS experiments conducted with the micro-mirror will also be presented.

Sanjay Dhabai

Papers

Design and fabrication of a micro-mirror for spectroscopy