S
Sari Johanna Kaipio
Researcher at ASM International
Publications - 10
Citations - 1300
Sari Johanna Kaipio is an academic researcher from ASM International. The author has contributed to research in topics: Thin film & Boron. The author has an hindex of 10, co-authored 10 publications receiving 1297 citations.
Papers
More filters
Patent
Production of elemental films using a boron-containing reducing agent
TL;DR: In this article, a method of growing elemental metal thin films by atomic layer deposition (ALD) using a boron compound as a reducing agent is described. But this method is restricted to a single substrate.
Patent
Method for depositing nanolaminate thin films on sensitive surfaces
TL;DR: In this paper, a method for growing conformal metal nitride, metal carbide and metal thin films, and nanolaminate structures incorporating these films, from aggressive chemicals is presented.
Patent
Deposition of transition metal carbides
TL;DR: In this article, a method of depositing transition metal carbide thin films by atomic layer deposition (ALD), in which a transition metal source compound and a carbon source compound are alternately provided to the substrate, is described.
Patent
Method of depositing transition metal nitride thin films
TL;DR: In this article, a method for depositing transition metal nitride thin films by an Atomic Layer Deposition (ALD) type process is described, where vapor-phase pulses of a metal source material, a reducing agent capable of reducing metal sources material, and a nitrogen source material capable of reacting with the reduced metal source materials are alternately and sequentially fed into a reaction space and contacted with the substrate.
Patent
Process for growing metalloid thin films
TL;DR: In this paper, a process for growing an electrically conductive metalloid thin film on a substrate with a chemical vapor deposition process is described, where a metal source material and a reducing agent are vaporized and fed into a reaction space.