S
Satoru Watanabe
Publications - 4
Citations - 246
Satoru Watanabe is an academic researcher. The author has contributed to research in topics: Silicon & Etching (microfabrication). The author has an hindex of 3, co-authored 4 publications receiving 245 citations.
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Journal ArticleDOI
Homogeneous hydrogen-terminated Si(111) surface formed using aqueous HF solution and water
TL;DR: In this paper, the authors studied the effect of immersion in water, following aqueous HF etching, on the surface hydride structure and flatness, by measuring Si-H stretching vibration using infrared absorption spectroscopy.
Journal ArticleDOI
Silicon-Monohydride Termination of Silicon-111 Surface Formed by Boiling Water
TL;DR: In this article, the authors studied the effect of immersion in water following aqueous HF etching on the surface hydride structure of Si(111) by measuring Si-H stretching vibration using infrared absorption spectroscopy.
Journal ArticleDOI
Fluorine Adsorption and Etching on Si(111):SiH Surface during Immersion in HF Solution
Satoru Watanabe,Mayumi Shigeno +1 more
TL;DR: In this paper, the infrared spectrum of Si(111) after terminating its surface with silicon monohydride and immersing it in various concentrations of HF solution to induce fluorine adsorption was examined.
Proceedings ArticleDOI
Silicon-Monohydride Termination of Silicon-(111) Surface Formed by Boiling Water
TL;DR: In this paper, the authors studied the effect of immersion in water following aqueous HF etching on the surface hydride structure of Si(111) by measuring Si-H stretching vibration using infrared absorption spectroscopy.