S
Seiichi Mori
Researcher at Toshiba
Publications - 1
Citations - 89
Seiichi Mori is an academic researcher from Toshiba. The author has contributed to research in topics: Silicon nitride & Layer (electronics). The author has an hindex of 1, co-authored 1 publications receiving 89 citations.
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Patent
Method of manufacturing capacitor
TL;DR: In this paper, the thin natural oxide film formed on a surface of a first polycrystalline silicon layer containing an impurity diffused at a high concentration is transformed into a silicon nitride film by rapid nitriding.