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Shane C. Woody

Researcher at University of North Carolina at Charlotte

Publications -  32
Citations -  435

Shane C. Woody is an academic researcher from University of North Carolina at Charlotte. The author has contributed to research in topics: Metrology & Actuator. The author has an hindex of 12, co-authored 32 publications receiving 406 citations.

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Journal ArticleDOI

Development of a virtual probe tip with an application to high aspect ratio microscale features

TL;DR: In this article, a 700:1 high aspect ratio probe shank is fabricated with a 7μm diameter, and attached at one end to an oscillator, which produces a standing wave in the oscillating probe.
Patent

Closed loop control systems employing relaxor ferroelectric actuators

TL;DR: In this article, a closed loop motion control system employing at least one relaxor actuator which controls the position of a moving member having mass by controlling an electric field applied to the actuator is described.
Journal ArticleDOI

Design and performance of a dual drive system for tip-tilt angular control of a 300 mm diameter mirror

TL;DR: In this article, the authors present a dual-stage tip-tilt steering mechanism driven by ultra-high strain piezoelectric stacked actuators for coarse and fine motion control.
Journal ArticleDOI

Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology

TL;DR: A compact, fiber-coupled, six degree-of-freedom measurement system which enables fast, accurate calibration, and error mapping of precision linear stages is presented and has the advantages of simplicity, compactness, and relatively low cost.
Patent

Method and apparatus using a closed loop controlled actuator for surface profilometry

TL;DR: In this article, an apparatus for profiling the surface of a workpiece, including a probe adapted to make contact with the workpiece surface, a sensor for determining or deriving the force between the probe and the surface, and an actuator that adjusts the position of the probe along an axis, which is generally perpendicular to the surface.