S
Shane C. Woody
Researcher at University of North Carolina at Charlotte
Publications - 32
Citations - 435
Shane C. Woody is an academic researcher from University of North Carolina at Charlotte. The author has contributed to research in topics: Metrology & Actuator. The author has an hindex of 12, co-authored 32 publications receiving 406 citations.
Papers
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Journal ArticleDOI
Development of a virtual probe tip with an application to high aspect ratio microscale features
TL;DR: In this article, a 700:1 high aspect ratio probe shank is fabricated with a 7μm diameter, and attached at one end to an oscillator, which produces a standing wave in the oscillating probe.
Patent
Closed loop control systems employing relaxor ferroelectric actuators
TL;DR: In this article, a closed loop motion control system employing at least one relaxor actuator which controls the position of a moving member having mass by controlling an electric field applied to the actuator is described.
Journal ArticleDOI
Design and performance of a dual drive system for tip-tilt angular control of a 300 mm diameter mirror
Shane C. Woody,Stuart T. Smith +1 more
TL;DR: In this article, the authors present a dual-stage tip-tilt steering mechanism driven by ultra-high strain piezoelectric stacked actuators for coarse and fine motion control.
Journal ArticleDOI
Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology
TL;DR: A compact, fiber-coupled, six degree-of-freedom measurement system which enables fast, accurate calibration, and error mapping of precision linear stages is presented and has the advantages of simplicity, compactness, and relatively low cost.
Patent
Method and apparatus using a closed loop controlled actuator for surface profilometry
TL;DR: In this article, an apparatus for profiling the surface of a workpiece, including a probe adapted to make contact with the workpiece surface, a sensor for determining or deriving the force between the probe and the surface, and an actuator that adjusts the position of the probe along an axis, which is generally perpendicular to the surface.