S
Shankun Dong
Publications - 3
Citations - 29
Shankun Dong is an academic researcher. The author has contributed to research in topics: Etching (microfabrication) & Reactive-ion etching. The author has an hindex of 1, co-authored 3 publications receiving 29 citations.
Papers
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Journal ArticleDOI
Anisotropic Charge Transport Enabling High‐Throughput and High‐Aspect‐Ratio Wet Etching of Silicon Carbide
Dachuan Shi,Yun Chen,Zijian Li,Shankun Dong,Liyi Li,Maoxiang Hou,Hui Li,Shenghe Zhao,Xin Chen,Ching-Ping Wong,Ni Zhao +10 more
TL;DR: In this paper , an etching structure that exploits anisotropic charge carrier flow to enable high-throughput, external bias-free wet etching of high-aspect-ratio SiC micro/nano-structures is demonstrated.
Journal ArticleDOI
Silicon Carbide Nano-Via Arrays Fabricated by Double-Sided Metal-Assisted Photochemical Etching
Journal ArticleDOI
Review—Progress in Electrochemical Etching of Third-Generation Semiconductors
Yun Chen,Pengfei Yu,Yi Jun Zhong,Shankun Dong,Maoxiang Hou,Hui Li,Xin Chen,Jian Gao,Ching-Ping Wong +8 more
TL;DR: In this paper , the authors provide a systematic review of the electrochemical etching of third-generation semiconductors, which is helpful for researchers to supplement the content in this field, and even non-researchers in the field will be able to familiarize themselves with the relevant content quickly.