scispace - formally typeset
S

Shankun Dong

Publications -  3
Citations -  29

Shankun Dong is an academic researcher. The author has contributed to research in topics: Etching (microfabrication) & Reactive-ion etching. The author has an hindex of 1, co-authored 3 publications receiving 29 citations.

Papers
More filters
Journal ArticleDOI

Anisotropic Charge Transport Enabling High‐Throughput and High‐Aspect‐Ratio Wet Etching of Silicon Carbide

TL;DR: In this paper , an etching structure that exploits anisotropic charge carrier flow to enable high-throughput, external bias-free wet etching of high-aspect-ratio SiC micro/nano-structures is demonstrated.
Journal ArticleDOI

Review—Progress in Electrochemical Etching of Third-Generation Semiconductors

TL;DR: In this paper , the authors provide a systematic review of the electrochemical etching of third-generation semiconductors, which is helpful for researchers to supplement the content in this field, and even non-researchers in the field will be able to familiarize themselves with the relevant content quickly.