S
Sharon Mccauley
Researcher at KLA-Tencor
Publications - 9
Citations - 282
Sharon Mccauley is an academic researcher from KLA-Tencor. The author has contributed to research in topics: Reticle & Wafer. The author has an hindex of 5, co-authored 9 publications receiving 282 citations.
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Patent
Methods and systems for inspection of wafers and reticles using designer intent data
Paul Frank Marella,Sharon Mccauley,Ellis Chang,William Volk,James Wiley,Sterling G. Watson,Sagar A. Kekare,Carl Hess +7 more
TL;DR: In this article, a system for inspection of wafers and reticles using designer intent data is described. Butler et al. present a method for detecting defects on a wafer by analyzing data generated by inspection of the wafer in combination with data representative of a reticle, which includes designations identifying different types of portions of the reticle.
Patent
Methods and systems for binning defects detected on a specimen
TL;DR: In this article, a method for binning defects detected on a specimen is described, where the defect is assigned to a bin corresponding to the region of interest associated with the reference image, and the test image includes an image of one or more patterned features formed on the sample proximate to a defect detected on the specimen.
Patent
Flexible hybrid defect classification for semiconductor manufacturing
Patrick Huet,Maruti Shanbhag,Sandeep Bhagwat,Michal Kowalski,Vivekanand Kini,David Randall,Sharon Mccauley,Tong Huang,Jianxin Zhang,Kenong Wu,Gao Lisheng,Ariel Tribble,Ashok Kulkarni,Cecelia Campochiaro +13 more
TL;DR: Hybrid methods for classifying defects in semiconductor manufacturing are provided in this article, which include applying a flexible sequence of rules for defects to inspection data, including deterministic rules, statistical rules, hybrid rules, or some combination thereof.
Patent
Inspection system setup techniques
TL;DR: In this paper, a technique for efficiently setting up inspection, metrology, and review systems for operating upon semiconductor wafers is described, which involves setting up recipes that allow each system to accurately inspect semiconductor Wafers and presents the information to users in a way that greatly reduces the time required to complete a recipe.
Patent
Computer-implemented methods for performing one or more defect-related functions
TL;DR: In this article, computer-implemented methods for performing one or more defect-related functions are provided, such as classifying defects on a specimen using inspection data generated for the specimen combined with defect review data generated by the specimen.