S
Shimada Hisanori
Publications - 1
Citations - 4
Shimada Hisanori is an academic researcher. The author has contributed to research in topics: Mask inspection. The author has an hindex of 1, co-authored 1 publications receiving 4 citations.
Papers
More filters
Patent
Lsi mask inspection device
TL;DR: In this article, the cross-reference inspection of the original pictures and the data is performed by turning pattern information of original pictures to digital information and operate the same together with the information signals of data.