S
Shou-Gwo Wuu
Researcher at TSMC
Publications - 126
Citations - 1954
Shou-Gwo Wuu is an academic researcher from TSMC. The author has contributed to research in topics: Layer (electronics) & Image sensor. The author has an hindex of 26, co-authored 123 publications receiving 1928 citations.
Papers
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Patent
Double spacer technology for making self-aligned contacts (SAC) on semiconductor integrated circuits
TL;DR: In this paper, a method for making improved selfaligned contacts (SAC) to a patterned polysilicon layer, such as gate electrodes for FETs, is presented.
Patent
SRAM layout for relaxing mechanical stress in shallow trench isolation technology and method of manufacture thereof
TL;DR: In this paper, a semiconductor substrate is made with a source region has 90° transitions in critical locations, where the source and drain regions of a pass gate transistor are on the opposite sides of a wordline conductor.
Patent
Bonding process for cmos image sensor
TL;DR: In this paper, the authors present a method of making an integrated circuit (IC), which includes forming an electric device on a front side of a substrate, forming a top metal pad on the front of the substrate, coupled to the electric device, and forming a passivation layer.
Journal ArticleDOI
Light guide for pixel crosstalk improvement in deep submicron CMOS image sensor
T.H. Hsu,Y.K. Fang,Cheng-I Lin,S.F. Chen,Chih-Wei Lin,Dun-Nian Yaung,Shou-Gwo Wuu,Ho-Ching Chien,Chien-Hsien Tseng,Jeng-Shyan Lin,C.S. Wang +10 more
TL;DR: In this paper, a dielectric structure consisting of PE-oxide and FSG-oxide was developed to reduce pixel crosstalk in 0.18/spl mu/m CMOS image sensor technology.
Patent
Method of forming an image sensor cell and a CMOS logic circuit device
TL;DR: In this article, a process for integrating the formation of salicided, CMOS logic devices and of a non-salicided photodiode element, for a image sensor cell region, has been developed.