An apparatus may include a semiconductor chip and a fluidics assembly. The semiconductor chip has an array of wells and an array of sensors and each sensor of the array of sensors is in fluid communication with a well of the array of wells. The fluidics assembly is located on top of the semiconductor chip and is configured to deliver fluids to the semiconductor chip. The fluidics assembly includes a flow expansion chamber configured to introduce the fluids, an outlet portion configured to pipe out the fluids, and a flow chamber portion. The flow chamber portion is configured to allow the fluids to flow from the flow expansion chamber to the outlet portion and to allow the fluids to interact along the way with material in the array of wells. The flow expansion chamber has a curved wall at the top or bottom so that the height of the flow expansion chamber at the center is less than at the walls that restrict the fluids to the left and right.

Methods and apparatus for measuring analytes using large scale fet arrays

Methods and apparatus relating to FET arrays including large FET arrays for monitoring chemical and/or biological reactions such as nucleic acid sequencing-by-synthesis reactions. Some methods provided herein relate to improving signal (and also signal to noise ratio) from released hydrogen ions during nucleic acid sequencing reactions.

Methods and apparatus for measuring analytes

Methods and apparatuses relating to large scale FET arrays for analyte detection and measurement are provided. ChemFET (e.g., ISFET) arrays may be fabricated using conventional CMOS processing techniques based on improved FET pixel and array designs that increase measurement sensitivity and accuracy, and at the same time facilitate significantly small pixel sizes and dense arrays. Improved array control techniques provide for rapid data acquisition from large and dense arrays. Such arrays may be employed to detect a presence and/or concentration changes of various analyte types in a wide variety of chemical and/or biological processes.

Methods and apparatus for detecting molecular interactions using FET arrays

Progress in monitoring, modeling and control of bioprocesses during the last 20 years.

https://research.sabanciuniv.edu/13636/1/Review_on_carbon-derived%252C_solid-state%252C_micro_and_nano_sensors_for_electrochemical_sensing_applications.pdf

Review on carbon-derived, solid-state, micro and nano sensors for electrochemical sensing applications

A novel chemical-resistant ion-selective field-effect transistor (ISFET) array is introduced, using amorphous diamond-like carbon (DLC) films for passivation and as pH-sensitive layer. A DLC coating technology is developed, useful for depositing and patterning final thin films on active and passive surfaces of ISFET devices. The DLC films are produced by a low-temperature dual rf methane–helium gas mixture plasma. DLC thin films show complete chemical inert behaviour in aggressive aqueous electrolytes. The high film hardness in addition to the chemically inert behaviour makes DLC films more suitable as passivation layers for sensor devices than other materials (i.e. Si 3 N 4 , SiO 2 , etc.). It is shown from the results of electrochemical and electronic characterization of ISFET devices with DLC thin films that DLC is suitable for sensor applications. A comparative characterization of DLC-coated ISFET with a Ta 2 O 5 -coated ISFET on a single chip sensor is shown in this work. The pH response of the DLC ISFET shows lower drift than that of the Ta 2 O 5 -coated ISFET. No redox cross-sensitivity was found for DLC-coated ISFET. The shift of the sensor response is only slightly dependant on temperature.

T Lange

Papers

Diamond-like carbon-gate pH-ISFET