T
Takahiro Yoshizumi
Researcher at University of Hyogo
Publications - 5
Citations - 52
Takahiro Yoshizumi is an academic researcher from University of Hyogo. The author has contributed to research in topics: Extreme ultraviolet lithography & Mask inspection. The author has an hindex of 4, co-authored 5 publications receiving 52 citations.
Papers
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Journal ArticleDOI
Study of Critical Dimensions of Printable Phase Defects Using an Extreme Ultraviolet Microscope
Yoshito Kamaji,Kei Takase,Takahiro Yoshizumi,Takashi Sugiyama,Toshiyuki Uno,Takeo Watanabe,Hiroo Kinoshita +6 more
TL;DR: In this article, an extreme ultraviolet microscopy (EUVM) system for actinic mask inspection is presented, which consists of Schwarzschild optics and an X-ray zooming tube.
Journal ArticleDOI
Phase Defect Observation Using Extreme Ultraviolet Microscope
Kazuhiro Hamamoto,Yuzuru Tanaka,Takahiro Yoshizumi,Nobuyuki Hosokawa,Noriyuki Sakaya,Morio Hosoya,Tsutomu Shoki,Takeo Watanabe,Hiroo Kinoshita +8 more
TL;DR: In this article, an aerial image mask inspection system for extreme ultraviolet lithography (EUVL) is developed, which consists of microscopes using the same wavelength of light as is used for the exposure and produces a magnified image of defects on a mask.
Proceedings ArticleDOI
Phase defect observation using an EUV microscope
Kazuhiro Hamamoto,Yuzuru Tanaka,Takahiro Yoshizumi,Yasuyuki Fukushima,Hideaki Shiotani,Noriyuki Sakaya,Morio Hosoya,Tsutomu Shoki,Takeo Watanabe,Hiroo Kinoshita +9 more
TL;DR: In this article, the authors constructed the EUV microscope (EUVM) for actinic mask inspection which consists of Schwarzschild optics (NA0.3, 30X) and X-ray zooming tube.
Journal ArticleDOI
Study on critical dimension of printable phase defects using an EUV microscope
Hiroo Kinoshita,Takahiro Yoshizumi,M. Osugi,J. Kishimoto,Takashi Sugiyama,T. Uno,Takeo Watanabe +6 more
TL;DR: In this paper, an extreme ultraviolet microscopy (EUVM) system for actinic mask inspection is presented, which consists of Schwarzschild optics and an X-ray zooming tube.
Journal ArticleDOI
Observation of the internal defects of multilayer film
Hiroo Kinoshita,Kazuhiro Hamamoto,Noriyuki Sakaya,Morio Hosoya,Tsutomu Shoki,Y. Mizuta,Takahiro Yoshizumi,Kazuumi Tanaka,Takeo Watanabe +8 more
TL;DR: In this paper, the authors constructed the EUV microscope (EUVM) for actinic mask inspection which consists of Schwarzschild optics (NA 0.3, 30x) and X-ray zooming tube.