Takako Yamaguchi

TL;DR: In this paper, a near-field optical probe consisting of a micro-aperture for irradiating and/or detecting evanescent light through the front end of the probe, an elastically deformable cantilever supporting the micro-APerture at the free end thereof, and a surface plasmon polariton waveguide arranged on the cantilevers to guide light from a light source to the microprobe, was introduced.

TL;DR: In this article, a light modulating apparatus comprising first and second two periodic structures each having a period smaller than the wavelength of light emitted from a light source, and a moving means for relatively moving the two structures, wherein the surface of the first periodic structure is brought near to the surface on the other periodic structure to arrange them in a state opposed to each other, is presented.

TL;DR: In this paper, the authors evaluated the performances of Cr and amorphous Si films as light absorber materials for photomasks of near-field lithography on the basis of numerical studies using finite-difference time domain method and experimental results of fabrication process.

TL;DR: In this paper, the authors proposed a localized plasmon resonance sensor using metal particles such that the peak strength of an absorbance spectrum decreases and the width of the spectrum becomes broad due to variations in size of the metal particles and random configuration thereof.

TL;DR: In this paper, a pattern forming apparatus for forming a pattern on a substrate includes a first exposure section capable of conducting pattern exposure for a predetermined line width, a second exposure section for conducting pattern coverage for a line width greater than the predetermined linewidth of the first exposure, and a device for detecting the relative positional relationship between the first and second exposure sections.