The present invention is directed to methods for patterning a substrate by imprint lithography. Imprint lithography is a process in which a liquid is dispensed onto a substrate. A template is brought into contact with the liquid and the liquid is cured. The cured liquid includes an imprint of any patterns formed in the template. In one embodiment, the imprint process is designed to imprint only a portion of the substrate. The remainder of the substrate is imprinted by moving the template to a different portion of the template and repeating the imprint lithography process.

Step and repeat imprint lithography processes

Improved methods of forming a patterned self-assembled monolayer on a surface and derivative articles are provided. According to one method, an elastomeric stamp is deformed during and/or prior to using the stamp to print a self-assembled molecular monolayer on a surface. According to another method, during monolayer printing the surface is contacted with a liquid that is immiscible with the molecular monolayer-forming species to effect controlled reactive spreading of the monolayer on the surface. Methods of printing self-assembled molecular monolayers on nonplanar surfaces and derivative articles are provided, as are methods of etching surfaces patterned with self-assembled monolayers, including methods of etching silicon. Optical elements including flexible diffraction gratings, mirrors, and lenses are provided, as are methods for forming optical devices and other articles using lithographic molding. A method for controlling the shape of a liquid on the surface of an article is provided, involving applying the liquid to a self-assembled monolayer on the surface, and controlling the electrical potential of the surface.

Methods of etching articles via microcontact printing

The disclosed invention is a device for adhering cells in a specific and predetermined position. The device comprises a plate defining a surface and a plurality of cytophilic islands that adhere cells which are isolated by cytophobic regions to which cells do not adhere and further is contiguous with the cytophilic islands. The islands or the regions or both may be formed of a self-assembled monolayer (SAM). Further, the cytophobic regions are wide enough such that less than 10 percent of the cells adhered to the cytophilic islands are allowed to form bridges across the cytophobic regions and contact each other. The device is used in a method for culturing cells on a surface or in a medium and also for performing cytometry. Furthermore, the device is used in immobilization of cells at a surface and for controlling the shape of a cell.

Method of formation of microstamped patterns of plates for adhesion of cells and other biological materials, devices and uses therefor

An improved method of imprint lithography involves using direct fluid pressure to press the mold into a substrate-supported film (A). Advantageously the mold and/or substrate are sufficiently flexible to provide wide area contact under the fluid pressure (C). Fluid pressing can be accomplished by sealing the mold against the film and disposing the resulting assembly in a pressurized chamber. It can also be accomplished by subjecting the mold to jets of pressurized fluid. The result of this fluid pressing is enhanced resolution and high uniformity over an enlarged area.

Fluid pressure imprint lithography

Kit For Microcontact Printing

A micro-contact printing stamp (100) includes a flexible layer (104) made from an elastomer and having a stamping surface (105). Flexible layer (104) is attached to a support structure (102).

Micro-contact printing stamp

A micro-contact printing apparatus includes a pressure chamber with a micro-contact printing stamp, a vacuum chuck, elastomeric membrane and mechanical stops attached to the vacuum chuck and positioned within the chamber. An extractor pin is attached to the chamber and accessible externally. The micro-contact printing stamp includes a flexible layer made from an elastomer with a stamping surface and attached to a support structure. A method for micro-contact printing a substrate surface includes advancing the substrate surface toward the stamping surface and contacting mechanical stops with support structure before the substrate surface physically contacts the stamping surface. Springs of members adjust the position of the substrate surface to be parallel with the stamping surface. The membrane is inflated to physically contact the substrate surface with the stamping surface, in such a manner that complete adhesion of the stamping surface to the substrate surface is achieved. The extractor pin is used to disengage the substrate surface from the stamping surface at the chamber pressure used in micro-contact printing, so that distortion of the printing pattern is minimized.

Thomas M. Mance

Papers

Micro-contact printing stamp

Printing apparatus with inflatable means for advancing a substrate towards the stamping surface