T
Thomas Modes
Researcher at Fraunhofer Society
Publications - 22
Citations - 530
Thomas Modes is an academic researcher from Fraunhofer Society. The author has contributed to research in topics: Thin film & Sputter deposition. The author has an hindex of 11, co-authored 21 publications receiving 463 citations.
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Structure and properties of crystalline titanium oxide layers deposited by reactive pulse magnetron sputtering
TL;DR: In this paper, the variation of pulse mode between unipolar and bipolar allows the deposition of layers with anatase and rutile structures, respectively, on glass and silicon substrates by reactive pulse magnetron sputtering without additional substrate heating.
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Effect of scandium content on structure and piezoelectric properties of AlScN films deposited by reactive pulse magnetron sputtering
TL;DR: In this article, it was shown that up to up to 43% scandium concentration the wurtzite structure becomes more and more disordered and the c/a ratio is decreased from 1.6 to 1.27.
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Structure and properties of titanium oxide layers deposited by reactive plasma activated electron beam evaporation
TL;DR: In this paper, the influence of substrate temperature and plasma activation on structure and properties of TiO 2 layers is presented, and a drastic influence of plasminar activation on the properties of the layers is found.
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12% efficient CdTe/CdS thin film solar cells deposited by low-temperature close space sublimation
J. Schaffner,Markus Motzko,Alexander Tueschen,Andreas Swirschuk,H.-J. Schimper,Andreas Klein,Thomas Modes,Olaf Zywitzki,Wolfram Jaegermann +8 more
TL;DR: In this paper, the authors reported 12% efficient CdS/CdTe thin film solar cells prepared by low temperature close space sublimation (CSS), where both semiconductor films were deposited by high vacuum CSS in superstrate configuration on glass substrates with fluorine doped tin oxide (FTO) front contact.
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Photocatalytic titanium dioxide thin films prepared by reactive pulse magnetron sputtering at low temperature
TL;DR: An innovative reactive pulse magnetron sputtering (PMS) system allowing to change the pulse mode (unipolar, bipolar or pulse packet) has been used to deposit TiO 2 films at dynamic deposition rates of 8...50 nm m/min this paper.