T
Thomas Wagner
Researcher at University of Stuttgart
Publications - 23
Citations - 164
Thomas Wagner is an academic researcher from University of Stuttgart. The author has contributed to research in topics: Layer (electronics) & Epitaxy. The author has an hindex of 8, co-authored 23 publications receiving 162 citations.
Papers
More filters
Journal ArticleDOI
Single to polycrystalline transition in silicon growth by ion-assisted deposition at low temperatures
TL;DR: In this article, the microstructure of thin silicon films produced at temperatures below 450 °C by ion-assisted deposition was investigated and it was shown that epitaxial growth breaks down at a critical film thickness beyond which the growth changes to polycrystalline or amorphous.
Book ChapterDOI
Applying Agents for Engineering of Industrial Automation Systems
TL;DR: An agent-oriented solution for integrated engineering of automation systems is presented, applying the advantages of agent concepts while considering the constraints of existing automation structures.
Patent
Production of epitactic GaN layers on substrates
TL;DR: In this paper, a process for the application of an epitactic GaN layer to a substrate by pyrolysis of precursor compounds is described. But this process is not applicable to our work.
Journal ArticleDOI
High-quality and low-temperature epitaxial Si films deposited at very high deposition rate
TL;DR: In this paper, the authors investigated charge carrier recombination in Si films formed by ion-assisted deposition at temperatures between 460°C and 650°C, and they achieved a minority carrier diffusion length of 40μm in a 21-μm thick epitaxial Si film.