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Thomas Wagner

Researcher at University of Stuttgart

Publications -  23
Citations -  164

Thomas Wagner is an academic researcher from University of Stuttgart. The author has contributed to research in topics: Layer (electronics) & Epitaxy. The author has an hindex of 8, co-authored 23 publications receiving 162 citations.

Papers
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Journal ArticleDOI

Single to polycrystalline transition in silicon growth by ion-assisted deposition at low temperatures

TL;DR: In this article, the microstructure of thin silicon films produced at temperatures below 450 °C by ion-assisted deposition was investigated and it was shown that epitaxial growth breaks down at a critical film thickness beyond which the growth changes to polycrystalline or amorphous.
Book ChapterDOI

Applying Agents for Engineering of Industrial Automation Systems

TL;DR: An agent-oriented solution for integrated engineering of automation systems is presented, applying the advantages of agent concepts while considering the constraints of existing automation structures.
Patent

Production of epitactic GaN layers on substrates

TL;DR: In this paper, a process for the application of an epitactic GaN layer to a substrate by pyrolysis of precursor compounds is described. But this process is not applicable to our work.
Journal ArticleDOI

High-quality and low-temperature epitaxial Si films deposited at very high deposition rate

TL;DR: In this paper, the authors investigated charge carrier recombination in Si films formed by ion-assisted deposition at temperatures between 460°C and 650°C, and they achieved a minority carrier diffusion length of 40μm in a 21-μm thick epitaxial Si film.